Design and Simulation of A CMOS-MEMS Accelerometer
نویسندگان
چکیده
منابع مشابه
Montreux, Switzerland, 01-03 June 2005 ADVANCED PROCESS EMULATION AND CIRCUIT SIMULATION FOR CO-DESIGN OF MEMS AND CMOS DEVICES
We discuss the co-design of integrated MEMS accelerometer array designed and fabricated onto the input of a CMOS charge amplifier. The focus of this paper is on two parts of the design flow: Firstly, advanced 3D process emulation and secondly, circuit simulation. We use a "voxel" (volumetric pixel) based process emulation tool that takes 2D masks and a description of the fabrication process, to...
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